| ชื่อเรื่อง | : | Property study of aluminium oxide thin films by thermal annealing |
| นักวิจัย | : | Zhao, Zhiwei , Tay, Beng Kang |
| คำค้น | : | DRNTU::Engineering::Electrical and electronic engineering. |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2554 |
| อ้างอิง | : | Zhao, Z., & Tay, B. K. (2012). Property study of aluminium oxide thin films by thermal annealing. physica status solidi (c), 9(1), 77-80. , 1862-6351 , http://hdl.handle.net/10220/16801 , http://dx.doi.org/10.1002/pssc.201084181 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | physica status solidi (c) |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | Aluminium oxide thin films had been prepared by off-plane filtered cathodic vacuum arc (FCVA) under the oxygen partial pressure of 5 × 10-4 Torr at room temperature. Annealing effects on the properties of the films between 200 °C and 900 °C were investigated. Experiments results showed that the surfaces of aluminium oxide thin films remained smooth up to 600 °C. Crystallization is induced for the film annealed at 900 °C. It was also found that refractive index of the films increased with increasing the annealing temperature. Strong frequency dispersion of refractive index was found and fitted to a single oscillator model. The dispersion parameters, such as single oscillator energy, dispersion energy, average oscillator strength and its related wavelength, were estimated. |
| บรรณานุกรม | : |
Zhao, Zhiwei , Tay, Beng Kang . (2554). Property study of aluminium oxide thin films by thermal annealing.
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Zhao, Zhiwei , Tay, Beng Kang . 2554. "Property study of aluminium oxide thin films by thermal annealing".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Zhao, Zhiwei , Tay, Beng Kang . "Property study of aluminium oxide thin films by thermal annealing."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2554. Print. Zhao, Zhiwei , Tay, Beng Kang . Property study of aluminium oxide thin films by thermal annealing. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2554.
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