| ชื่อเรื่อง | : | Periodic feature patterning by lens based solid immersion multiple beam laser interference lithography. |
| นักวิจัย | : | Sidharthan Raghuraman. , Murukeshan, V. M. |
| คำค้น | : | - |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2555 |
| อ้างอิง | : | Sidharthan, R., & Murukeshan, V.M. (2012). Periodic feature patterning by lens based solid immersion multiple beam laser interference lithography. Laser Physics Letters, 9(9), 691-696. , http://hdl.handle.net/10220/16599 , http://dx.doi.org/10.7452/lapl.201210056 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | Laser physics letters |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | In this paper, we report a novel concept and methodology to fabricate high resolution periodic features using i-line laser source and multiple converging lenses. This configuration reduces the number of optical elements by employing a converging two-lens system to direct the beams on to the sample instead of conventional multiple mirror assembly that is normally associated with multiple beam interference configurations. A simple optical configuration using a 60° prism, 364 nm laser source and two converging lenses are employed to implement immersion lithography concept to achieve four beam interference. Square lattice patterns with pitch size of 210±8 and 240±6 nm are recorded on a positive photo resist using this technique. |
| บรรณานุกรม | : |
Sidharthan Raghuraman. , Murukeshan, V. M. . (2555). Periodic feature patterning by lens based solid immersion multiple beam laser interference lithography..
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Sidharthan Raghuraman. , Murukeshan, V. M. . 2555. "Periodic feature patterning by lens based solid immersion multiple beam laser interference lithography.".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Sidharthan Raghuraman. , Murukeshan, V. M. . "Periodic feature patterning by lens based solid immersion multiple beam laser interference lithography.."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print. Sidharthan Raghuraman. , Murukeshan, V. M. . Periodic feature patterning by lens based solid immersion multiple beam laser interference lithography.. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.
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