| ชื่อเรื่อง | : | The substrate cooling effect of ion beam post treatment on ZAO films properties |
| นักวิจัย | : | Wang, Wenna , Zhang, Dawei , Wang, Qi , Tao, Chuanxian , Ni, Zhengji , Zhuang, Songlin , Mei, Ting , Zhang, Dao Hua |
| คำค้น | : | DRNTU::Engineering::Electrical and electronic engineering. |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2555 |
| อ้างอิง | : | Wang, W., Zhang, D., Wang, Q., Tao, C., Ni, Z., Zhuang, S., et al. (2012). The substrate cooling effect of ion beam post treatment on ZAO films properties. 2012 Photonics Global Conference (PGC). , http://hdl.handle.net/10220/12197 , http://dx.doi.org/10.1109/PGC.2012.6458051 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | - |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | ZAO thin films with low surface roughness and low sheet resistance are required in the touch panels and display panels. In this work, we investigated the substrate cooling effect of ion beam post treatment on ZAO films properties, and one new way of obtain low surface roughness and low sheet resistance same time was proposed. The more exciting find of this paper is that, comparing to the samples without cooling during the process of ion beam post treatment, samples with proper cooling voltage show a sheet resistance decrease of 26% (from 11.9 Ω/□ to 8.8 Ω/□) and a roughness decrease of 35.5% (from 13.389 nm to 8.637 nm) without transparency losing. And the viewpoint that substrate cooling has the effect of weakening the crystallization, especially for the sub-face and internal parts of samples is deduced. |
| บรรณานุกรม | : |
Wang, Wenna , Zhang, Dawei , Wang, Qi , Tao, Chuanxian , Ni, Zhengji , Zhuang, Songlin , Mei, Ting , Zhang, Dao Hua . (2555). The substrate cooling effect of ion beam post treatment on ZAO films properties.
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Wang, Wenna , Zhang, Dawei , Wang, Qi , Tao, Chuanxian , Ni, Zhengji , Zhuang, Songlin , Mei, Ting , Zhang, Dao Hua . 2555. "The substrate cooling effect of ion beam post treatment on ZAO films properties".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Wang, Wenna , Zhang, Dawei , Wang, Qi , Tao, Chuanxian , Ni, Zhengji , Zhuang, Songlin , Mei, Ting , Zhang, Dao Hua . "The substrate cooling effect of ion beam post treatment on ZAO films properties."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print. Wang, Wenna , Zhang, Dawei , Wang, Qi , Tao, Chuanxian , Ni, Zhengji , Zhuang, Songlin , Mei, Ting , Zhang, Dao Hua . The substrate cooling effect of ion beam post treatment on ZAO films properties. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.
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