| ชื่อเรื่อง | : | The role of cold sonicated development scenarios for achieving ultradense and high aspect ratio for optical metamaterial applications |
| นักวิจัย | : | Tobing, Landobasa Yosef Mario A. L. , Tjahjana, Liliana , Zhang, Dao Hua |
| คำค้น | : | - |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2555 |
| อ้างอิง | : | Tobing, L. Y. M. A. L., Tjahjana, L., & Zhang, D. H. (2012). The role of cold sonicated development scenarios for achieving ultradense and high aspect ratio for optical metamaterial applications. 2012 Photonics Global Conference (PGC). , http://hdl.handle.net/10220/12195 , http://dx.doi.org/10.1109/PGC.2012.6458017 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | - |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | We present a systematic study of different sonicated cold development scenarios for the purpose of achieving high density optical metamaterial. High aspect ratio sub-15-nm dots at pitch as small as 40 nm are successfully demonstrated for 110-nm thick resist at low exposure dose. Some of the key results include sub-15-nm gold nanodots at 40-nm pitch and high density optical metamaterial (with only ~30nm separation between two adjacent resonators). |
| บรรณานุกรม | : |
Tobing, Landobasa Yosef Mario A. L. , Tjahjana, Liliana , Zhang, Dao Hua . (2555). The role of cold sonicated development scenarios for achieving ultradense and high aspect ratio for optical metamaterial applications.
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Tobing, Landobasa Yosef Mario A. L. , Tjahjana, Liliana , Zhang, Dao Hua . 2555. "The role of cold sonicated development scenarios for achieving ultradense and high aspect ratio for optical metamaterial applications".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Tobing, Landobasa Yosef Mario A. L. , Tjahjana, Liliana , Zhang, Dao Hua . "The role of cold sonicated development scenarios for achieving ultradense and high aspect ratio for optical metamaterial applications."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print. Tobing, Landobasa Yosef Mario A. L. , Tjahjana, Liliana , Zhang, Dao Hua . The role of cold sonicated development scenarios for achieving ultradense and high aspect ratio for optical metamaterial applications. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.
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