| ชื่อเรื่อง | : | Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates |
| นักวิจัย | : | Asri, R. I. M. , Hamzah, N. A. , Ahmad, M. A. , Taib, M. Ikram Md , Sahil, S. M. S. , Hassan, Z. |
| คำค้น | : | QC1-999 Physics |
| หน่วยงาน | : | Universiti Sains Malaysia, Malaysia |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2562 |
| อ้างอิง | : | http://eprints.usm.my/48849/1/ICoSeMT%202019%20ABSTRACT%20BOOK%20119.pdf , Asri, R. I. M. and Hamzah, N. A. and Ahmad, M. A. and Taib, M. Ikram Md and Sahil, S. M. S. and Hassan, Z. (2019) Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates. In: International Conference On Semiconductor Materials Technology. |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | http://eprints.usm.my/48849/ |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | The optical and electrical properties of indium tin oxide (ITO) thin films grown on soda-lime glass substrates using a radio frequency (RF) magnetron sputtering technique were studied as a function of the sputtering RF power. Fixed 100nm thickness of ITO films were deposited on the soda-lime glass substrates at 300°C, using RF powers ranging between 50 to 150W. The optical and electrical properties of the sputtered ITO films were characterized by Ultraviolet–Visible Spectroscopy (UV-Vis), Hall Effect Measurement and Atomic Force Microscope (AFM). Varying the substrate RF sputtering power affected surface roughness, resistivity and transmittance values. |
| บรรณานุกรม | : |
Asri, R. I. M. , Hamzah, N. A. , Ahmad, M. A. , Taib, M. Ikram Md , Sahil, S. M. S. , Hassan, Z. . (2562). Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates.
กรุงเทพมหานคร : Universiti Sains Malaysia, Malaysia. Asri, R. I. M. , Hamzah, N. A. , Ahmad, M. A. , Taib, M. Ikram Md , Sahil, S. M. S. , Hassan, Z. . 2562. "Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates".
กรุงเทพมหานคร : Universiti Sains Malaysia, Malaysia. Asri, R. I. M. , Hamzah, N. A. , Ahmad, M. A. , Taib, M. Ikram Md , Sahil, S. M. S. , Hassan, Z. . "Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates."
กรุงเทพมหานคร : Universiti Sains Malaysia, Malaysia, 2562. Print. Asri, R. I. M. , Hamzah, N. A. , Ahmad, M. A. , Taib, M. Ikram Md , Sahil, S. M. S. , Hassan, Z. . Role Of Rf Magnetron Sputtering Poweronoptical And Electrical Properties Of Ito Films On Soda-Lime Glass Substrates. กรุงเทพมหานคร : Universiti Sains Malaysia, Malaysia; 2562.
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