| ชื่อเรื่อง | : | Subwavelength interference lithography based on a unidirectional surface plasmon coupler |
| นักวิจัย | : | Yang, Xuefeng , Zhang, Shuxia , Zhang, Dao Hua , Wang, Yueke , Wang, Jian |
| คำค้น | : | DRNTU::Engineering::Electrical and electronic engineering::Antennas, wave guides, microwaves, radar, radio , DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2556 |
| อ้างอิง | : | Yang, X., Zhang, S., Zhang, D. H., Wang, Y., & Wang, J. (2013). Subwavelength interference lithography based on a unidirectional surface plasmon coupler. Optical engineering, 52(8), 086109-. , 0091-3286 , http://hdl.handle.net/10220/25326 , http://dx.doi.org/10.1117/1.OE.52.8.086109 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | Optical engineering |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | A subwavelength interference lithography method is numerically demonstrated based on surface plasmon polaritons excited by unidirectional couplers, and the unidirectional coupler is composed of a conventional nanoslit with a nanochannel excavated from one side of this nanoslit. Simulation results show that a feature size of 50 nm half-pitch pattern can be obtained at the working wavelength of 365 nm, and this method can enhance the intensity of the interference pattern with higher contrast and field depth and is advantageous to the fabrication process in practical applications. |
| บรรณานุกรม | : |
Yang, Xuefeng , Zhang, Shuxia , Zhang, Dao Hua , Wang, Yueke , Wang, Jian . (2556). Subwavelength interference lithography based on a unidirectional surface plasmon coupler.
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Yang, Xuefeng , Zhang, Shuxia , Zhang, Dao Hua , Wang, Yueke , Wang, Jian . 2556. "Subwavelength interference lithography based on a unidirectional surface plasmon coupler".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Yang, Xuefeng , Zhang, Shuxia , Zhang, Dao Hua , Wang, Yueke , Wang, Jian . "Subwavelength interference lithography based on a unidirectional surface plasmon coupler."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2556. Print. Yang, Xuefeng , Zhang, Shuxia , Zhang, Dao Hua , Wang, Yueke , Wang, Jian . Subwavelength interference lithography based on a unidirectional surface plasmon coupler. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2556.
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