Transparent, hydrophobic hybrid films were deposited on glass substrate from the solution containing hydroxyl-terminated polydimethyl siloxane (PDMS) and TiO2 sol by using a dip coating method. The effects of film’s heat treatment temperature and PDMS/TiO2 component on surface properties of the hybrid films were investigated by water drop contact angle measurement, and by an atomic force microscopy (AFM) and a scanning electron microscope (SEM) analysis. Surface morphology of the hybrid film changed from smooth surface containing tiny spikes to rougher surface containing large protrusions during heat treatment temperatures of 60 - 300C and became smooth surface containing very fine spikes at 500C, corresponding to a change hydrophobicity behavior from contact angle measurement. The suitable condition for preparation of hydrophobic coating from this current recipe was at the PDMS/TiO2 volume ratio of 1.00 - 2.33 and heat treatment temperature of 60 C. All the films were transparent regardless of post heat treatment temperature. However, the films containing higher content of the PDMS were slightly more transparent.