Wafer fabrication is a very long and complex manufacturing process where multiple layers of chemical films are microscopically constructed and patterned to form intricate electronic devices. Each of the layers, both underneath and above the wafer surface, is formed through a series of processing steps, many of which are repeated several times at the other layers. Without a proper tracking method, in-process wafers can either get lost or misprocessed. The problems that follow range from mild (rework) to very severe (plant shut-down). Also, without the tracking system, one cannot get the real-time update on the plant operation and control. To overcome these shortfalls, TMEC has developed a tracking system called TMEC Runcard System V1.0. The new system has been rigorously tested using real wafers and proven to be robust. The test involved running and tracking multiple product lots of wafers from the beginning to the end of the process flow under the new tracking system. So far, there have been a total of 12 product lots completed under the new system with no fault. Through the system, the history of all the completed lots are fully traceable. Currently, there are a total of 18 active product lots being run smoothly under the system. Lastly, the operation data from all the active lots are successfully transmitted real-time to the plant operation and control report system. /Wafer fabrication is a very long and complex manufacturing process where multiple layers of chemical films are microscopically constructed and patterned to form intricate electronic devices. Each of the layers, both underneath and above the wafer surface, is formed through a series of processing steps, many of which are repeated several times at the other layers. Without a proper tracking method, in-process wafers can either get lost or misprocessed. The problems that follow range from mild (rework) to very severe (plant shut-down). Also, without the tracking system, one cannot get the real-time update on the plant operation and control. To overcome these shortfalls, TMEC has developed a tracking system called TMEC Runcard System V1.0. The new system has been rigorously tested using real wafers and proven to be robust. The test involved running and tracking multiple product lots of wafers from the beginning to the end of the process flow under the new tracking system. So far, there have been a total of 12 product lots completed under the new system with no fault. Through the system, the history of all the completed lots are fully traceable. Currently, there are a total of 18 active product lots being run smoothly under the system. Lastly, the operation data from all the active lots are successfully transmitted real-time to the plant operation and control report system.