| ชื่อเรื่อง | : | Fourier transform infrared spectroscopy of low-k dielectric material on patterned wafers |
| นักวิจัย | : | Lam, Jeffrey Chorkeung , Tan, Hao , Huang, Maggie Y. M. , Zhang, Fan , Sun, Handong , Shen, Zexiang , Mai, Zhihong |
| คำค้น | : | - |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2555 |
| อ้างอิง | : | Lam, J. C., Tan, H., Huang, M. Y., Zhang, F., Sun, H., Shen, Z., et al. (2012). Fourier Transform Infrared Spectroscopy of Low-k Dielectric Material on Patterned Wafers. Japanese Journal of Applied Physics, 51. , 0021-4922 , http://hdl.handle.net/10220/11660 , http://dx.doi.org/10.1143/JJAP.51.111501 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | Japanese journal of applied physics |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | With many of research on Fourier transform IR (FTIR) on low-k materials, our experiments extended the FTIR spectroscopy application to characterization and analysis of the low-k dielectric thin film properties on patterned wafers. FTIR spectra on low-k materials were successfully captured under three sampling modes: reflection, attenuated total reflectance (ATR), and mapping mode. ATR mode is more suitable for CHx band than reflection mode due to its higher sensitivity in this range. FTIR spectroscopy signal analysis on mixed structures (metal and low-k dielectric material) on patterned wafers was also investigated with mapping mode. Based on our investigation, FTIR can be used for low-k material studies on patterned wafer. |
| บรรณานุกรม | : |
Lam, Jeffrey Chorkeung , Tan, Hao , Huang, Maggie Y. M. , Zhang, Fan , Sun, Handong , Shen, Zexiang , Mai, Zhihong . (2555). Fourier transform infrared spectroscopy of low-k dielectric material on patterned wafers.
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Lam, Jeffrey Chorkeung , Tan, Hao , Huang, Maggie Y. M. , Zhang, Fan , Sun, Handong , Shen, Zexiang , Mai, Zhihong . 2555. "Fourier transform infrared spectroscopy of low-k dielectric material on patterned wafers".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Lam, Jeffrey Chorkeung , Tan, Hao , Huang, Maggie Y. M. , Zhang, Fan , Sun, Handong , Shen, Zexiang , Mai, Zhihong . "Fourier transform infrared spectroscopy of low-k dielectric material on patterned wafers."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print. Lam, Jeffrey Chorkeung , Tan, Hao , Huang, Maggie Y. M. , Zhang, Fan , Sun, Handong , Shen, Zexiang , Mai, Zhihong . Fourier transform infrared spectroscopy of low-k dielectric material on patterned wafers. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.
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