| ชื่อเรื่อง | : | Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor |
| นักวิจัย | : | Arockiasamy, S. , Maiyalagan, Thandavarayan , Kuppusami, P. , Mallika, C. , Nagaraja, K. S. |
| คำค้น | : | - |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2555 |
| อ้างอิง | : | Arockiasamy, S., Maiyalagan, T., Kuppusami, P., Mallika, C.,& Nagaraja, K. (2012). Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor. Micro and nanosystems, 4(3), 199-207. , 1876-4029 , http://hdl.handle.net/10220/11352 , http://dx.doi.org/10.2174/1876402911204030199 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | Micro and nanosystems |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | Titanium nitride (TiN)/nickel (Ni) composite coatings were synthesized by plasma assisted metal-organic chemical vapour deposition (PAMOCVD) using organo-metallic and metal-organic complexes namely dichlorobis( 5- cyclopentadienyl)titanium (IV) for titanium and N,N'-ethylene-bis(2,4-pentanedion-iminoato)nickel(II) for nickel. The growth of such films was investigated in nitrogen (N2) plasma environment in the substrate temperature range of 450- 550ºC at a deposition pressure of 0.5-1 mbar. Prior to the deposition of films, the Ti precursor was subjected to the equilibrium vapour pressure measurements by employing TG/DTA in transpiration mode, which led to the value of 109.2 ± 5.6 kJ mol-1 for the standard enthalpy of sublimation (ΔHo sub). The phase identification using glancing incidence x-ray diffraction showed Ni/TiN is a nanocomposite coating containing nanocrystals of Ni and TiN with face centered cubic structure. Scanning electron microscopy revealed a uniform surface morphology of the films, while chemical analysis by energy dispersive analysis confirmed the presence of titanium, nickel and nitrogen in the composite films. |
| บรรณานุกรม | : |
Arockiasamy, S. , Maiyalagan, Thandavarayan , Kuppusami, P. , Mallika, C. , Nagaraja, K. S. . (2555). Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor.
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Arockiasamy, S. , Maiyalagan, Thandavarayan , Kuppusami, P. , Mallika, C. , Nagaraja, K. S. . 2555. "Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Arockiasamy, S. , Maiyalagan, Thandavarayan , Kuppusami, P. , Mallika, C. , Nagaraja, K. S. . "Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print. Arockiasamy, S. , Maiyalagan, Thandavarayan , Kuppusami, P. , Mallika, C. , Nagaraja, K. S. . Deposition of Ni/TiN composite coatings by a plasma assisted MOCVD using an organometallic precursor. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.
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