| ชื่อเรื่อง | : | Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching |
| นักวิจัย | : | Zhang, Hua , Amro, Nabil A. , Disawal, Sandeep , Elghanian, Robert , Shile, Roger , Fragala, Joseph |
| คำค้น | : | DRNTU::Engineering::Materials. |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2549 |
| อ้างอิง | : | Zhang, H., Amro, N. A., Disawal, S., Elghanian, R., Shile, R., & Fragala, J. (2006). Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching. Applied Surface Science, 253(4), 1960-1963. , 0169-4332 , http://hdl.handle.net/10220/10516 , http://dx.doi.org/10.1016/j.apsusc.2006.03.045 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | Applied surface science |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | A method, combining micro-contact printing (μCP), wet chemical etching and reactive ion etching (RIE), is reported to fabricate microstructures on Si and SiOx. Positive and negative structures were generated based on different stamps used for μCP. The reproducibility of the obtained microstructures shows the methodology reported herein could be useful in Micro-Electro-Mechanical Systems (MEMS), optical and biological sensing applications. |
| บรรณานุกรม | : |
Zhang, Hua , Amro, Nabil A. , Disawal, Sandeep , Elghanian, Robert , Shile, Roger , Fragala, Joseph . (2549). Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching.
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Zhang, Hua , Amro, Nabil A. , Disawal, Sandeep , Elghanian, Robert , Shile, Roger , Fragala, Joseph . 2549. "Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Zhang, Hua , Amro, Nabil A. , Disawal, Sandeep , Elghanian, Robert , Shile, Roger , Fragala, Joseph . "Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2549. Print. Zhang, Hua , Amro, Nabil A. , Disawal, Sandeep , Elghanian, Robert , Shile, Roger , Fragala, Joseph . Microstructure array on Si and SiOx generated by micro-contact printing, wet chemical etching and reactive ion etching. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2549.
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