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Immersion nickel deposition on blank silicon in aqueous solution containing ammonium fluoride

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : Immersion nickel deposition on blank silicon in aqueous solution containing ammonium fluoride
นักวิจัย : Zhang, Xi , Chen, Zhong , Tu, K. N.
คำค้น : DRNTU::Engineering::Materials.
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2550
อ้างอิง : Zhang, X., Chen, Z., & Tu, K.N. (2007). Immersion nickel deposition on blank silicon in aqueous solution containing ammonium fluoride. Thin Solid Films, 515(11), 4696-4701. , 0040-6090 , http://hdl.handle.net/10220/9474 , http://dx.doi.org/10.1016/j.tsf.2006.11.033
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : Thin solid films
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

Immersion deposition of Ni on p-Si (100) blank substrates was carried out in an aqueous NiSO4 solution at a pH value of 8 through displacement reactions. Study of the early deposition stage revealed that incorporation of 2.5 M NH4F in solution promoted Ni nucleation significantly. By adding fluoride, it was observed that metallic Ni was deposited constantly at the expense of Si and the deposition was not self-limited. Sponge-like Ni deposits were observed and it might explain the non-limiting feature of such immersion Ni deposition over Si. Transmission electron microscopic images of Ni/Si cross-sections showed that during the reactions, Si oxide played a role of the intermediate phase. The whole process could have involved successive Si oxidation steps. Eventually the oxide was etched away by fluoride resulting in a nanoporous Ni film.

บรรณานุกรม :
Zhang, Xi , Chen, Zhong , Tu, K. N. . (2550). Immersion nickel deposition on blank silicon in aqueous solution containing ammonium fluoride.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Zhang, Xi , Chen, Zhong , Tu, K. N. . 2550. "Immersion nickel deposition on blank silicon in aqueous solution containing ammonium fluoride".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Zhang, Xi , Chen, Zhong , Tu, K. N. . "Immersion nickel deposition on blank silicon in aqueous solution containing ammonium fluoride."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2550. Print.
Zhang, Xi , Chen, Zhong , Tu, K. N. . Immersion nickel deposition on blank silicon in aqueous solution containing ammonium fluoride. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2550.