| ชื่อเรื่อง | : | Bonding and diffusion of nitrogen in the InSbN alloys fabricated by two-step ion implantation |
| นักวิจัย | : | Wang, Youyi , Zhang, Dao Hua , Chen, X. Z. , Jin, Y. J. , Li, J. H. , Liu, C. J. , Wee, A. T. S. , Zhang, Sam , Ramam, A. |
| คำค้น | : | DRNTU::Science::Chemistry::Analytical chemistry::Gas analysis. |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2555 |
| อ้างอิง | : | Wang, Y., Zhang, D. H., Chen, X. Z., Jin, Y. J., Li, J. H., Liu, C. J., et al. (2012). Bonding and diffusion of nitrogen in the InSbN alloys fabricated by two-step ion implantation. Applied Physics Letters, 101(2), 021905-. , 0003-6951 , http://hdl.handle.net/10220/9340 , http://dx.doi.org/10.1063/1.4734507 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | Applied physics letters |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | We report bonding and diffusion behavior of nitrogen incorporated into InSb wafer by two-step implantation. Three nitrogen-containing regions, i.e., a surface accumulation region, a uniform region, and a tail region, were observed in the samples after post annealing. X-ray photoelectron spectroscopy measurements at different depths reveal that majority of the nitrogen forms In-N bonds in the uniform region but exists as interstitial defects in the tail region. The diffusion coefficients of nitrogen in InSb were obtained by fitting the modified Fick’s law with experimental data and the activation energy of 0.55 ± 0.04 eV extracted confirms the interstitial dominating diffusion of nitrogen in the InSb wafer. |
| บรรณานุกรม | : |
Wang, Youyi , Zhang, Dao Hua , Chen, X. Z. , Jin, Y. J. , Li, J. H. , Liu, C. J. , Wee, A. T. S. , Zhang, Sam , Ramam, A. . (2555). Bonding and diffusion of nitrogen in the InSbN alloys fabricated by two-step ion implantation.
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Wang, Youyi , Zhang, Dao Hua , Chen, X. Z. , Jin, Y. J. , Li, J. H. , Liu, C. J. , Wee, A. T. S. , Zhang, Sam , Ramam, A. . 2555. "Bonding and diffusion of nitrogen in the InSbN alloys fabricated by two-step ion implantation".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Wang, Youyi , Zhang, Dao Hua , Chen, X. Z. , Jin, Y. J. , Li, J. H. , Liu, C. J. , Wee, A. T. S. , Zhang, Sam , Ramam, A. . "Bonding and diffusion of nitrogen in the InSbN alloys fabricated by two-step ion implantation."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print. Wang, Youyi , Zhang, Dao Hua , Chen, X. Z. , Jin, Y. J. , Li, J. H. , Liu, C. J. , Wee, A. T. S. , Zhang, Sam , Ramam, A. . Bonding and diffusion of nitrogen in the InSbN alloys fabricated by two-step ion implantation. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.
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