| ชื่อเรื่อง | : | Nano-opto-mechanical actuator driven by gradient optical force. |
| นักวิจัย | : | Cai, H. , Xu, K. J. , Liu, A. Q. , Fang, Q. , Yu, M. B. , Lo, Guo-Qing. , Kwong, Dim Lee. |
| คำค้น | : | DRNTU::Engineering::Electrical and electronic engineering. |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2555 |
| อ้างอิง | : | Cai, H., Xu, K. J., Liu, A. Q., Fang, Q., Yu, M. B., Lo, G. Q., et al. (2012). Nano-opto-mechanical actuator driven by gradient optical force. Applied Physics Letters, 100(1). , 0003-6951 , http://hdl.handle.net/10220/9260 , http://dx.doi.org/10.1063/1.3673854 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | Applied physics letters |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | In this letter, a nanoscale opto-mechanical actuator driven by gradient optical force is designed and demonstrated. The nanoscale actuator can achieve a maximum displacement of 67 nm with a response time of 94.5 ns. The optical force is estimated as 1.01 pN/μm/mW in C-band operating wavelengths. The device is fabricated on silicon-on-insulator wafer using standard dry etching processes. Compared with traditional microelectromechanical systems actuators driven by electrostatic force, the nanoscale opto-mechanical actuator has the advantages of high resolution of actuation, nanoscale displacement, and fast operating speed. It has potential applications in optical signal processing, chemical, and biological sensing. |
| บรรณานุกรม | : |
Cai, H. , Xu, K. J. , Liu, A. Q. , Fang, Q. , Yu, M. B. , Lo, Guo-Qing. , Kwong, Dim Lee. . (2555). Nano-opto-mechanical actuator driven by gradient optical force..
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Cai, H. , Xu, K. J. , Liu, A. Q. , Fang, Q. , Yu, M. B. , Lo, Guo-Qing. , Kwong, Dim Lee. . 2555. "Nano-opto-mechanical actuator driven by gradient optical force.".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Cai, H. , Xu, K. J. , Liu, A. Q. , Fang, Q. , Yu, M. B. , Lo, Guo-Qing. , Kwong, Dim Lee. . "Nano-opto-mechanical actuator driven by gradient optical force.."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print. Cai, H. , Xu, K. J. , Liu, A. Q. , Fang, Q. , Yu, M. B. , Lo, Guo-Qing. , Kwong, Dim Lee. . Nano-opto-mechanical actuator driven by gradient optical force.. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.
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