| ชื่อเรื่อง | : | Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics |
| นักวิจัย | : | Forleo, Angiola , Francioso, Luca , Capone, Simonetta , Casino, Flavio , Siciliano, Pietro , Tan, Ooi Kiang , Huang, Hui |
| คำค้น | : | DRNTU::Engineering::Electrical and electronic engineering::Nanoelectronics. |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2553 |
| อ้างอิง | : | Forleo, A., Francioso, L., Capone, S., Casino, F., Siciliano, P., Tan, O. K., & et al. (2010). Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics. Sensors and Actuators B: Chemical, 154, 283-287. , http://hdl.handle.net/10220/7024 , http://dx.doi.org/10.1016/j.snb.2010.01.010 , 160002 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | Sensors and actuators B: chemical |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | SnO2 nanorods were successfully deposited on 3″ Si/SiO2 wafers by inductively coupled plasma-enhanced chemical vapour deposition (PECVD) and a wafer-level patterning of nanorods layer for miniaturized solid state gas sensor fabrication were performed. Uniform needle-shaped SnO2 nanorods in situ grown were obtained under catalyst- and high temperature treatment-free growth condition. These nanorods have an average diameter between 5 and 15 nm and a length of 160–300 nm. The SnO2-nanorods based gas sensors were tested towards NH3 and CH3OH and gas sensing tests show remarkable response, showing promising and repeatable results compared with the SnO2 thin films gas sensors. |
| บรรณานุกรม | : |
Forleo, Angiola , Francioso, Luca , Capone, Simonetta , Casino, Flavio , Siciliano, Pietro , Tan, Ooi Kiang , Huang, Hui . (2553). Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics.
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Forleo, Angiola , Francioso, Luca , Capone, Simonetta , Casino, Flavio , Siciliano, Pietro , Tan, Ooi Kiang , Huang, Hui . 2553. "Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Forleo, Angiola , Francioso, Luca , Capone, Simonetta , Casino, Flavio , Siciliano, Pietro , Tan, Ooi Kiang , Huang, Hui . "Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2553. Print. Forleo, Angiola , Francioso, Luca , Capone, Simonetta , Casino, Flavio , Siciliano, Pietro , Tan, Ooi Kiang , Huang, Hui . Fabrication at wafer level of miniaturized gas sensors based on SnO2 nanorods deposited by PECVD and gas sensing characteristics. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2553.
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