A simple temporal analysis algorithm (phase scanning method) is proposed for 3-D surface profile measurement of a vibrating object based on shadow moiré technique. A grating is positioned close to a low-frequency vibrating object and its shadow is observed through the grating. The moiré fringe patterns, generated by the interference of grating lines and shadow lines, are captured by a high-speed CCD camera with a telecentric gauging lens. Phase values are evaluated point by point using phase scanning method. From the phase values of each point on the object, the high-quality surface profile of the specimen at different instants of vibration can be retrieved. In this application, two specimens are tested to demonstrate the validity of the method, one is a spherical cap with height of 4 mm, the other is a small coin with unevenness of less than 0.2 mm. The experimental results are compared with test results using mechanical stylus method.