| ชื่อเรื่อง | : | Vibration measurement of a micro-structure by digital holographic microscopy |
| นักวิจัย | : | Shi, Hongjian , Fu, Yu , Quan, Chenggen , Tay, Cho Jui , He, Xiaoling |
| คำค้น | : | DRNTU::Science::Physics::Optics and light. |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2552 |
| อ้างอิง | : | Shi, H., Fu, Y., Quan, C., Tay, C. J., & He, X. (2009). Vibration measurement of a micro-structure by digital holographic microscopy. Measurement Science and Technology, 20(6). , 0957-0233 , http://hdl.handle.net/10220/6700 , http://dx.doi.org/10.1088/0957-0233/20/6/065301 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | Measurement science and technology |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | A method for the vibration measurement of a micro-electro-mechanical system (MEMS) structure based on digital holographic microscopy (DHM) is presented. A sequence of digital holograms of a vibrating micro-beam excited by varying voltage is captured by a high-speed CCD camera. The phase changes of the object at different instants are obtained by digital reconstruction. The displacement, velocity and acceleration are evaluated by both spatial and temporal Fourier and windowed Fourier analyses. The results show that digital holographic microscopy with Fourier analyses is an effective method for evaluating the dynamic characteristics of a MEMS component. |
| บรรณานุกรม | : |
Shi, Hongjian , Fu, Yu , Quan, Chenggen , Tay, Cho Jui , He, Xiaoling . (2552). Vibration measurement of a micro-structure by digital holographic microscopy.
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Shi, Hongjian , Fu, Yu , Quan, Chenggen , Tay, Cho Jui , He, Xiaoling . 2552. "Vibration measurement of a micro-structure by digital holographic microscopy".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Shi, Hongjian , Fu, Yu , Quan, Chenggen , Tay, Cho Jui , He, Xiaoling . "Vibration measurement of a micro-structure by digital holographic microscopy."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2552. Print. Shi, Hongjian , Fu, Yu , Quan, Chenggen , Tay, Cho Jui , He, Xiaoling . Vibration measurement of a micro-structure by digital holographic microscopy. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2552.
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