| ชื่อเรื่อง | : | Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering |
| นักวิจัย | : | Bashir, Umar , Hassan, Zainuriah , Ahmed, Naser M. |
| คำค้น | : | QC1-999 Physics |
| หน่วยงาน | : | Universiti Sains Malaysia, Malaysia |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2559 |
| อ้างอิง | : | http://eprints.usm.my/48795/1/ZO3.pdf%20done.pdf , Bashir, Umar and Hassan, Zainuriah and Ahmed, Naser M. (2016) Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering. In: 3rd Meeting of Malaysia Nitrides Research Group (MNRG 2016). |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | http://eprints.usm.my/48795/ |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | This paper presents the study and characterization of indium nitride (InN) films grown on quartz glass and p-Si (111) substrates by RF magnetron sputtering method using pure indium target in argon (Ar) and nitrogen (N 2) environment. The characterization was carried out by high resolution X-ray diffraction (HRXRD), atomic force microscopy (AFM), field emission scanning electron microscopy (FESEM) and energy dispersive X-ray spectroscopy (EDX). XRD results show the growth of polycrystalline wurtzite films with varying peak intensities. The deposited films were annealed in nitrogen environment at different temperatures ranging from 1 00°C to 400°C. The annealing was carried out for four hours and the results were compared with pre-annealing samples. |
| บรรณานุกรม | : |
Bashir, Umar , Hassan, Zainuriah , Ahmed, Naser M. . (2559). Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering.
กรุงเทพมหานคร : Universiti Sains Malaysia, Malaysia. Bashir, Umar , Hassan, Zainuriah , Ahmed, Naser M. . 2559. "Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering".
กรุงเทพมหานคร : Universiti Sains Malaysia, Malaysia. Bashir, Umar , Hassan, Zainuriah , Ahmed, Naser M. . "Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering."
กรุงเทพมหานคร : Universiti Sains Malaysia, Malaysia, 2559. Print. Bashir, Umar , Hassan, Zainuriah , Ahmed, Naser M. . Influence of Annealing Temperature on InN Thin Films Grown by RF Magnetron Sputtering. กรุงเทพมหานคร : Universiti Sains Malaysia, Malaysia; 2559.
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