| ชื่อเรื่อง | : | Investigation of simultaneous thermal oxidation and nitridation of sputtered zirconium on silicon and silicon carbide in nitrous oxide gas environment |
| นักวิจัย | : | Wong, Yew Hoong |
| คำค้น | : | TN1-997 Mining engineering. Metallurgy |
| หน่วยงาน | : | Universiti Sains Malaysia, Malaysia |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2555 |
| อ้างอิง | : | http://eprints.usm.my/44927/1/WONG%20YEW%20HOONG.pdf , Wong, Yew Hoong (2012) Investigation of simultaneous thermal oxidation and nitridation of sputtered zirconium on silicon and silicon carbide in nitrous oxide gas environment. PhD thesis, Universiti Sains Malaysia. |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | http://eprints.usm.my/44927/ |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | Thin film Zr on Si and SiC were formed by sputtering. The films then underwent simultaneous oxidation and nitridation in N2O. The effects of oxidation/nitridation durations (5 20 min) and temperatures (500 1100oC) on the sputtered Zr/Si system and the effects of oxidation/nitridation temperatures (400 900oC) and the concentrations of N2O (10 100%) to the characteristics of the sputtered Zr/SiC system were studied. Structural, chemical, and electrical properties of the samples were examined. X-ray photoelectron spectroscopy results showed that ZrO2 thin film was formed with an interfacial layer (IL) of Zr-silicate oxynitride (ZrSiON) on Si, while Zr-oxynitride (ZrON) thin film was formed with an IL of ZrSiON and carbon nitride on SiC. |
| บรรณานุกรม | : |
Wong, Yew Hoong . (2555). Investigation of simultaneous thermal oxidation and nitridation of sputtered zirconium on silicon and silicon carbide in nitrous oxide gas environment.
กรุงเทพมหานคร : Universiti Sains Malaysia, Malaysia. Wong, Yew Hoong . 2555. "Investigation of simultaneous thermal oxidation and nitridation of sputtered zirconium on silicon and silicon carbide in nitrous oxide gas environment".
กรุงเทพมหานคร : Universiti Sains Malaysia, Malaysia. Wong, Yew Hoong . "Investigation of simultaneous thermal oxidation and nitridation of sputtered zirconium on silicon and silicon carbide in nitrous oxide gas environment."
กรุงเทพมหานคร : Universiti Sains Malaysia, Malaysia, 2555. Print. Wong, Yew Hoong . Investigation of simultaneous thermal oxidation and nitridation of sputtered zirconium on silicon and silicon carbide in nitrous oxide gas environment. กรุงเทพมหานคร : Universiti Sains Malaysia, Malaysia; 2555.
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