| ชื่อเรื่อง | : | Monolithic CMOS-MEMS integration for high-g accelerometers |
| นักวิจัย | : | Narasimhan, Vinayak , Li, Holden , Tan, Chuan Seng |
| คำค้น | : | DRNTU::Engineering::Mechanical engineering::Kinematics and dynamics of machinery |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | Gruneisen, Mark T. , Dusek, Miloslav , Rarity, John G. , Lewis, Keith L. , Hollins, Richard C. , Merlet, Thomas J. , Toet, Alexander |
| ปีพิมพ์ | : | 2557 |
| อ้างอิง | : | Narasimhan, V., Li, H., & Tan, C. S. (2014). Monolithic CMOS-MEMS integration for high-g accelerometers. Proceedings of SPIE 9254, Emerging Technologies in Security and Defence II; and Quantum-Physics-based Information Security III, 9254. , http://hdl.handle.net/10220/25113 , http://dx.doi.org/10.1117/12.2070667 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | - |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | This paper highlights work-in-progress towards the conceptualization, simulation, fabrication and initial testing of a silicon-germanium (SiGe) integrated CMOS-MEMS high-g accelerometer for military, munition, fuze and shock measurement applications. Developed on IMEC’s SiGe MEMS platform, the MEMS offers a dynamic range of 5,000 g and a bandwidth of 12 kHz. The low noise readout circuit adopts a chopper-stabilization technique implementing the CMOS through the TSMC 0.18 µm process. The device structure employs a fully differential split comb-drive set up with two sets of stators and a rotor all driven separately. Dummy structures acting as protective over-range stops were designed to protect the active components when under impacts well above the designed dynamic range. |
| บรรณานุกรม | : |
Narasimhan, Vinayak , Li, Holden , Tan, Chuan Seng . (2557). Monolithic CMOS-MEMS integration for high-g accelerometers.
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Narasimhan, Vinayak , Li, Holden , Tan, Chuan Seng . 2557. "Monolithic CMOS-MEMS integration for high-g accelerometers".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Narasimhan, Vinayak , Li, Holden , Tan, Chuan Seng . "Monolithic CMOS-MEMS integration for high-g accelerometers."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2557. Print. Narasimhan, Vinayak , Li, Holden , Tan, Chuan Seng . Monolithic CMOS-MEMS integration for high-g accelerometers. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2557.
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