Two different viscous coating materials, which are Polydimethylsiloxane (PDMS) mixed with 10%wt of Dicumylperoxide (DCP), and Semifluorinate Silane (SFS), were applied to silicon micro-asperity. The cosine’s Young and viscosity of those coating materials are -0.3584,-0.3496 and 3.176x10-3, 1.339 x10-3 Pas, respectively. The rough surfaces with nine asperity shapes were studied. The results shown that, pillar shape has an effect on water contact angle (WCA): Stripe asperity cannot make the average WCA greater than 150. When consider the pillar asperity, the WCA falls between 152 and 157, which exhibits a superhydrophobic surface property. However, actual WCA of the micro-asperity coated with PDMS+10%wt of DCP is lower than that coated with SFS around 1 to 7. High viscous material makes the asperity size bigger than the design and decreases the WCA: the low viscous material is more suitable for coating on the asperities.