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Device building blocks for photonic integration : design and process.

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : Device building blocks for photonic integration : design and process.
นักวิจัย : Lee, Chee Wei.
คำค้น : DRNTU::Engineering::Electrical and electronic engineering::Optics, optoelectronics, photonics.
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2551
อ้างอิง : Lee, C. W. (2008). Device building blocks for photonic integration : design and process. Doctoral thesis, Nanyang Technological University, Singapore. , http://hdl.handle.net/10356/4110
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : -
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

Photonic integration involves integration of several photonic devices on one common platform. It is able to reduce the system size and cost, improve the system reliability, and minimize the optical loss. In the presentation, the design of some building blocks in photonic integration are presented, namely the vertical coupler for polarization manipulation, lateral mode filter and coarse wavelength splitter by using directional coupler. The fabrication processes of photonic devices are also studied and are used in the fabrication of simple photonic integrated device. Room temperature dry etching of InP using chlorine recipes are optimized. The etch rates are reasonable and the sidewall profiles are almost 90º. Integrated devices between vertical coupler and multimode interferometer, and between multimode interferometer and electroabsorption modulator, are fabricated. The fabrication is complicated as it involves multiple layers and passive-active integration, but nevertheless, the devices are fabricated. The optimization of the device performance is beyond the scope of the thesis.

บรรณานุกรม :
Lee, Chee Wei. . (2551). Device building blocks for photonic integration : design and process..
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Lee, Chee Wei. . 2551. "Device building blocks for photonic integration : design and process.".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Lee, Chee Wei. . "Device building blocks for photonic integration : design and process.."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2551. Print.
Lee, Chee Wei. . Device building blocks for photonic integration : design and process.. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2551.