| ชื่อเรื่อง | : | Growth and characterization of oxide thin films by filtered cathodic vacuum arc and their applications. |
| นักวิจัย | : | Zhao, Zhiwei. |
| คำค้น | : | DRNTU::Engineering::Electrical and electronic engineering::Electronic apparatus and materials. , DRNTU::Engineering::Materials::Microelectronics and semiconductor materials::Thin films. |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2548 |
| อ้างอิง | : | Zhao, Z. W. (2005). Growth and characterization of oxide thin films by filtered cathodic vacuum arc and their applications. Doctoral thesis, Nanyang Technological University, Singapore. , http://hdl.handle.net/10356/4033 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | - |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | This study deals with three kinds of metal oxide thin films, namely zirconium oxide, titanium oxide and aluminium oxide, prepared by filtered cathodic vacuum arc (FCVA). The influences of various process parameters (e.g. working pressure, substrate temperature & bias, etc.) on the film properties are investigated, with much attention paid to the film optical properties. |
| บรรณานุกรม | : |
Zhao, Zhiwei. . (2548). Growth and characterization of oxide thin films by filtered cathodic vacuum arc and their applications..
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Zhao, Zhiwei. . 2548. "Growth and characterization of oxide thin films by filtered cathodic vacuum arc and their applications.".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Zhao, Zhiwei. . "Growth and characterization of oxide thin films by filtered cathodic vacuum arc and their applications.."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2548. Print. Zhao, Zhiwei. . Growth and characterization of oxide thin films by filtered cathodic vacuum arc and their applications.. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2548.
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