| ชื่อเรื่อง | : | Dopant profile model in a shallow germanium n+/p junction |
| นักวิจัย | : | Baek, Jung Woo , Shim, Jaewoo , Park, Jin-Hong , Jung, Woo-Shik , Yu, Hyun-Yong |
| คำค้น | : | DRNTU::Engineering::Mechanical engineering |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2556 |
| อ้างอิง | : | Baek, J. W., Shim, J., Park, J. H., Jung, W. S., & Yu, H. Y. (2013). Dopant Profile Model in a Shallow Germanium n+/p Junction. Journal of The Korean Physical Society, 63(10), 1855-1858. , http://hdl.handle.net/10220/18462 , http://dx.doi.org/10.3938/jkps.63.1855 , 175128 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | Journal of the Korean physical society |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | A challenging issue is to estimate the n-type dopant profiles and, consequently, their diffusivities in shallow Ge n+/p junctions because of their abnormal dopant profiles that do not follow conventional Gaussian-distribution-based diffusion theory. In order to fit the abnormal dopant profiles in shallow junctions, what are due to (1) fast and asymmetric diffusion of n-type dopants and (2) dopant pileup caused by surface back-scattering phenomenon, we propose a new profiling function and verify it by using a fitting algorithm based on the least-squares method. Through this fitting algorithm, we estimate the diffusivity and peak-position values from the raw dopant profile data, and we provide the experimental diffusivity equations as a function of the annealing temperature. |
| บรรณานุกรม | : |
Baek, Jung Woo , Shim, Jaewoo , Park, Jin-Hong , Jung, Woo-Shik , Yu, Hyun-Yong . (2556). Dopant profile model in a shallow germanium n+/p junction.
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Baek, Jung Woo , Shim, Jaewoo , Park, Jin-Hong , Jung, Woo-Shik , Yu, Hyun-Yong . 2556. "Dopant profile model in a shallow germanium n+/p junction".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Baek, Jung Woo , Shim, Jaewoo , Park, Jin-Hong , Jung, Woo-Shik , Yu, Hyun-Yong . "Dopant profile model in a shallow germanium n+/p junction."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2556. Print. Baek, Jung Woo , Shim, Jaewoo , Park, Jin-Hong , Jung, Woo-Shik , Yu, Hyun-Yong . Dopant profile model in a shallow germanium n+/p junction. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2556.
|
ridm@nrct.go.th ระบบคลังข้อมูลงานวิจัยไทย รายการโปรดที่คุณเลือกไว้
