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Non-contact measurement for 3D profile of hybrid metal thin film by white-light interference system

หน่วยงาน Nanyang Technological University, Singapore

รายละเอียด

ชื่อเรื่อง : Non-contact measurement for 3D profile of hybrid metal thin film by white-light interference system
นักวิจัย : Zhu, Shaoli , Zhou, Wei , Song, Yunfeng
คำค้น : -
หน่วยงาน : Nanyang Technological University, Singapore
ผู้ร่วมงาน : -
ปีพิมพ์ : 2555
อ้างอิง : Zhu, S., Zhou, W., & Song, Y. (2012). Non-Contact Measurement for 3D Profile of Hybrid Metal Thin Film by White-Light Interference System. Advanced Science Letters, 18, 36-42. , http://hdl.handle.net/10220/11501 , http://dx.doi.org/10.1166/asl.2012.4250
ที่มา : -
ความเชี่ยวชาญ : -
ความสัมพันธ์ : Advanced science letters
ขอบเขตของเนื้อหา : -
บทคัดย่อ/คำอธิบาย :

We presented a novel optical non-contact measurement system for detection of the thickness and 3D profile of a hybrid film. The optical interference system and the corresponding compiled data processing program for realizing the non-contact detection of thickness and 3D profile of the hybrid metal film were designed. White light source was used to generate the optical interference of the hybrid Au-Ag metallic film. The characteristics of the film were analyzed through the interference fringe. The original color fringe is obtained from a CCD camera, and the Red-Green-Blue (RGB) raw fringe image is put into our compiled numerical program. The fringe phase was wrapped using Fourier transform technique. The unwrapped phase was reconstructed to be the whole-filed Z image and 3D profile by use of a bilateral filter.

บรรณานุกรม :
Zhu, Shaoli , Zhou, Wei , Song, Yunfeng . (2555). Non-contact measurement for 3D profile of hybrid metal thin film by white-light interference system.
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Zhu, Shaoli , Zhou, Wei , Song, Yunfeng . 2555. "Non-contact measurement for 3D profile of hybrid metal thin film by white-light interference system".
    กรุงเทพมหานคร : Nanyang Technological University, Singapore.
Zhu, Shaoli , Zhou, Wei , Song, Yunfeng . "Non-contact measurement for 3D profile of hybrid metal thin film by white-light interference system."
    กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2555. Print.
Zhu, Shaoli , Zhou, Wei , Song, Yunfeng . Non-contact measurement for 3D profile of hybrid metal thin film by white-light interference system. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2555.