| ชื่อเรื่อง | : | Grid-based simulation of industrial thin-film production. |
| นักวิจัย | : | Krzhizhanovskaya, Valeria V. , Sloot, Peter M. A. , Gorbachev, Yu. E. |
| คำค้น | : | - |
| หน่วยงาน | : | Nanyang Technological University, Singapore |
| ผู้ร่วมงาน | : | - |
| ปีพิมพ์ | : | 2548 |
| อ้างอิง | : | Krzhizhanovskaya, V. V. , Sloot, P. M. A., & Gorbachev, Y. E. (2005). Grid-Based Simulation of Industrial Thin-Film Production. SIMULATION, 81(1), 77-85. , http://hdl.handle.net/10220/10144 , http://dx.doi.org/10.1177/0037549705051972 |
| ที่มา | : | - |
| ความเชี่ยวชาญ | : | - |
| ความสัมพันธ์ | : | SIMULATION |
| ขอบเขตของเนื้อหา | : | - |
| บทคัดย่อ/คำอธิบาย | : | In this article, the authors introduce a Grid-based virtual reactor, a High Level Architecture (HLA)- supported problem-solving environment that allows for detailed numerical study of industrial thin-film production in plasma-enhanced chemical vapor deposition (PECVD) reactors. They briefly describe the physics and chemistry underpinning the deposition process, the numerical approach to simulate these processes on advanced computer architectures, and the associated software environment supporting computational experiments. The authors built an efficient problem-solving environment for scientists studying PECVD processes and end users working in the chemical industry and validated the resulting virtual reactor against real experiments. |
| บรรณานุกรม | : |
Krzhizhanovskaya, Valeria V. , Sloot, Peter M. A. , Gorbachev, Yu. E. . (2548). Grid-based simulation of industrial thin-film production..
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Krzhizhanovskaya, Valeria V. , Sloot, Peter M. A. , Gorbachev, Yu. E. . 2548. "Grid-based simulation of industrial thin-film production.".
กรุงเทพมหานคร : Nanyang Technological University, Singapore. Krzhizhanovskaya, Valeria V. , Sloot, Peter M. A. , Gorbachev, Yu. E. . "Grid-based simulation of industrial thin-film production.."
กรุงเทพมหานคร : Nanyang Technological University, Singapore, 2548. Print. Krzhizhanovskaya, Valeria V. , Sloot, Peter M. A. , Gorbachev, Yu. E. . Grid-based simulation of industrial thin-film production.. กรุงเทพมหานคร : Nanyang Technological University, Singapore; 2548.
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